Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

Wei Xu; Bo Gao; Shenhui Ma; Anping Zhang; Yi Chiu; Yi Kuen Lee

doi:10.1109/MEMSYS.2016.7421590

Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

Wei Xu, Bo Gao, Shenhui Ma, Anping Zhang, Yi Chiu, Yi Kuen Lee^*

^*Corresponding author for this work

Department of Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

35 Scopus citations

Abstract

In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C∼48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	189-192
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421590
State	Published - 26 Feb 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Access to Document

10.1109/MEMSYS.2016.7421590

Cite this

Xu, W., Gao, B., Ma, S., Zhang, A., Chiu, Y., & Lee, Y. K. (2016). Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 189-192). Article 7421590 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421590

Xu, Wei ; Gao, Bo ; Ma, Shenhui et al. / Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 189-192 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology",

abstract = "In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C∼48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.",

author = "Wei Xu and Bo Gao and Shenhui Ma and Anping Zhang and Yi Chiu and Lee, {Yi Kuen}",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

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language = "English",

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Xu, W, Gao, B, Ma, S, Zhang, A, Chiu, Y & Lee, YK 2016, Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421590, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 189-192, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421590

Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology. / Xu, Wei; Gao, Bo; Ma, Shenhui et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 189-192 7421590 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

AU - Xu, Wei

AU - Gao, Bo

AU - Ma, Shenhui

AU - Zhang, Anping

AU - Chiu, Yi

AU - Lee, Yi Kuen

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N2 - In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C∼48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.

AB - In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow (T2MCF) sensor by using a commercial 0.35μm 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of T2MCF sensor under different ambient temperatures Ta of 22°C∼48°C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust T2MCF sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.

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Xu W, Gao B, Ma S, Zhang A, Chiu Y, Lee YK. Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 189-192. 7421590. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421590

Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

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