Skip to main navigation Skip to search Skip to main content

Local Strained Channel (LSC) nMOSFETs by different poly-Si gate and SiN capping layer thicknesses: Mobility enhancement, size dependence, and hot carrier stress

  • Yao Jen Lee*
  • , Chia Hao Fan
  • , Wen Luh Yang
  • , Wen Yan Lin
  • , Bohr Ran Huang
  • , Tien-Sheng Chao
  • , D. S. Chuu
    • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Fingerprint

Dive into the research topics of 'Local Strained Channel (LSC) nMOSFETs by different poly-Si gate and SiN capping layer thicknesses: Mobility enhancement, size dependence, and hot carrier stress'. Together they form a unique fingerprint.
Sort by