Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Jui Che Tsai; Li Cheng Lu; Wei Chi Hsu; Chia-Wei Sun; Ming C. Wu

doi:10.1088/0960-1317/18/1/015015

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Jui Che Tsai^*, Li Cheng Lu, Wei Chi Hsu, Chia-Wei Sun, Ming C. Wu

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

A driving scheme using a pair of differential voltages (V_x, V_y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of 3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V.

Original language	English
Article number	015015
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/18/1/015015
State	Published - 1 Jan 2008

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abstract = "A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of 3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V.",

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AU - Wu, Ming C.

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Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

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