Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers

How Foo Chen, Rung Fu Lin, Wei Lun Chiang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Laser velocimetry capable of measuring nanoscale motion or displacement normal to vibrational surface is always important in industry and scientific applications. However, measurement sensitivity down to sub-nanometer scale is always a challenge, and utilization of lock-in amplifiers is unavoidable. Measurement is then also limited to single-point detection. Here we report a laser Doppler velocimetry capable of non-contact detection in sub-nanometer scale down to sub-Hertz frequency in a Mach-Zehnder configuration without lock-in amplifiers. Environment perturbation in tens of nanometer scale can be removed by empirical mode decomposition. Lack of lock-in amplifiers promises this technology not limited to single-point detection. Downloading of the abstract is permitted for personal use only.

Original languageEnglish
Title of host publicationNanoengineering
Subtitle of host publicationFabrication, Properties, Optics, and Devices XII
EditorsElizabeth A. Dobisz, Louay A. Eldada, Eva M. Campo
PublisherSPIE
ISBN (Electronic)9781628417227
DOIs
StatePublished - 2015
EventNanoengineering: Fabrication, Properties, Optics, and Devices XII - San Diego, United States
Duration: 11 Aug 201512 Aug 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9556
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceNanoengineering: Fabrication, Properties, Optics, and Devices XII
Country/TerritoryUnited States
CitySan Diego
Period11/08/1512/08/15

Keywords

  • Doppler shift
  • Microscopy
  • Nanometer
  • Remote detection

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