Abstract
This study investigates the viability of using laser polishing to improve the inner surface quality of micro-holes in quartz. Roughness measurements reveal a significant improvement: the initial unprocessed surface exhibited a Ra of 0.31 μm, which was reduced to 0.08 μm after laser polishing. The residual stress induced in the internally polished areas of the quartz holes by laser polishing is negligible..
| Original language | English |
|---|---|
| State | Published - 2024 |
| Event | 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of Duration: 4 Aug 2024 → 8 Aug 2024 |
Conference
| Conference | 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 |
|---|---|
| Country/Territory | Korea, Republic of |
| City | Incheon |
| Period | 4/08/24 → 8/08/24 |