Investigation of the time dependent gate dielectric stability in SiC MOSFETs with planar and trench gate structures

Wei Cheng Lin, Wei Chen Yu, Bang Ren Chen, Yu Sheng Hsiao, Zhen Hong Huang, Chia Lung Hung, Yi Kai Hsiao, Nai Jen Yeh, Hao Chung Kuo, Chang Ching Tu*, Tian Li Wu

*Corresponding author for this work

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Engineering

Earth and Planetary Sciences