Investigation of Intrinsic Ferroelectric Switching induced Variation for Scaled FeFETs considering Limited Domain Number

Yi Chin Luo, Pin Su

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, using Monte-Carlo simulations with nucleation-limited-switching (NLS) model, we investigate the intrinsic ferroelectric switching induced variation for scaled ferroelectric field-effect-transistor (FeFET) nonvolatile memory (NVM) with limited domain number. Our study suggests that, for a given mean value of memory window (MW), adequately reducing the saturated polarization (Ps) of the ferroelectric can mitigate the variability in MW because the impact of polarization charges from each domain flipping can be reduced. In addition, the impacts of other factors such as the equivalent oxide thickness of the interlayer layer on the mean MW and the variability in MW for the FeFET NVM will also be discussed. Our study may provide insights for future high-density FeFET design.

Original languageEnglish
Title of host publication2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665409230
DOIs
StatePublished - 2022
Event2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022 - Hsinchu, Taiwan
Duration: 18 Apr 202221 Apr 2022

Publication series

Name2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022

Conference

Conference2022 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2022
Country/TerritoryTaiwan
CityHsinchu
Period18/04/2221/04/22

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