Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs

Chen Wei Lin, Chia-Tso Chao, Chih Chieh Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Investigation of gate oxide short in FinFETs and the test methods for FinFET SRAMs'. Together they form a unique fingerprint.

Keyphrases

Engineering

Physics

Material Science