Investigation of deposition technique and thickness effect of HfO2 film in bilayer InWZnO-based conductive bridge random access memory

Chih Chieh Hsu, Po Tsun Liu*, Kai Jhih Gan, Dun Bao Ruan, Simon M. Sze

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

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Keyphrases

Engineering

Material Science