Investigation of deposition technique and thickness effect of HfO2 film in bilayer InWZnO-based conductive bridge random access memory

Chih Chieh Hsu, Po Tsun Liu*, Kai Jhih Gan, Dun Bao Ruan, Simon M. Sze

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Investigation of deposition technique and thickness effect of HfO2 film in bilayer InWZnO-based conductive bridge random access memory'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science