Investigation of characteristics of multi-function ZnO thin film deposited with various argon and oxygen ratios

Che Wei Hsu, Tsung Chieh Cheng, Chun Hui Yang, Yi Ling Shen, Jong-Shinn Wu*, Sheng Yao Wu, Wen Hsien Huang

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


The ZnO thin film was deposited on a glass substrate at RT by the RF reactive magnetron sputtering method. Structural, chemical, optical, and hydrophilic/hydrophobic properties are measured by using a surface profilometer, an x-ray diffractometry (XRD), an x-ray photoelectron spectroscopy (XPS), a UV-VIS spectrophotometer, and a contact angle system, respectively. Results show that the deposition rate decreases with increasing O2/(Ar+O 2) ratio. In additiion, the best stoichiometric and quality of ZnO thin film was observed at 0.30 of O2/(Ar+O2) ratio, which shows the smallest FWHM and the strongest O-Zn strength. Regardless of O 2/(Ar+O2) ratio effect or thickness effect, high transmittance (> 86%) in the visible region is observed, while the UV-shielding characteristics depend upon both the magnitude of film thickness. The film thickness plays a more prominent role in controlling optical properties, especially in the UV-shielding characteristics, than the O 2/(Ar+O2) ratio. However, the hydrophobic characteristics can be obtained when the glass coating with ZnO thin films. In general, with properly coated ZnO thin film, we can obtain a glass substrate which is highly transparent in the visible region, has good UV-shielding characteristics, and possesses highly hydrophobic characteristics (self-clean capability), which is highly suitable for applications in the glass industries.

Original languageEnglish
Title of host publicationFunctional Metal-Oxide Nanostructures
Number of pages6
StatePublished - 2009
Event2009 MRS Spring Meeting: Functional Metal-Oxide Nanostructures - San Francisco, CA, United States
Duration: 14 Apr 200917 Apr 2009

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2009 MRS Spring Meeting: Functional Metal-Oxide Nanostructures
Country/TerritoryUnited States
CitySan Francisco, CA


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