Interfacial reaction between amorphous silicon and palladium thin films

H. T.G. Hentzell*, P. A. Psaras, King-Ning Tu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Interfacial reactions between amorphous Si and Pd films of thickness of 1, 5, 50 and 200 nm in the as-deposited state and after annealing from 200 to 500°C have been studied by transmission electron microscopy and Rutherford backscattering spectroscopy. An amorphous phase is observed in the as-deposited state in samples of 1 nm Pd on α-Si, yet Pd2Si is observed in the as-deposited and annealed states in thicker films. The growth of Pd2Si from 200 to 235°C is diffusion controlled with an activation energy of 1.25 eV. Enhanced crystallization of remaining α-Si in contact to Pd2Si occurs between 400 and 500°C.

Original languageEnglish
Pages (from-to)255-260
Number of pages6
JournalMaterials Letters
Volume3
Issue number7-8
DOIs
StatePublished - 1 Jan 1985

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