Interfacial abruptness in Si/SiGe heteroepitaxy grown by ultrahigh vacuum chemical vapor deposition

Wen Chung Tsai*, Chun Yen Chang, Tz Guei Jung, Ting Chang Chang, Horng-Chih Lin, Liang Po Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering

Material Science