Interface and electrical properties of La-silicate for direct contact of high-k with silicon

K. Kakushima*, K. Tachi, M. Adachi, K. Okamoto, S. Sato, J. Song, T. Kawanago, P. Ahmet, K. Tsutsui, N. Sugii, T. Hattori, H. Iwai

*Corresponding author for this work

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