Integration of hetero-structure body-tied Ge FinFET using retrograde-well implantation
- Yu Che Chou
- , Chung Chun Hsu
- , Cheng Ting Chun
- , Chen Han Chou
- , Ming Li Tsai
- , Yi He Tsai
- , Wei Li Lee
- , Shin Yuan Wang
- , Guang Li Luo
- , Chao-Hsin Chien*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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