Integration of hetero-structure body-tied Ge FinFET using retrograde-well implantation

Yu Che Chou, Chung Chun Hsu, Cheng Ting Chun, Chen Han Chou, Ming Li Tsai, Yi He Tsai, Wei Li Lee, Shin Yuan Wang, Guang Li Luo, Chao-Hsin Chien*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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