@inproceedings{23ee13dbdc5f4728a778c30daa3ba541,
title = "Integration of 2.4GHz RF transmitter with accelerometer for mobile sensing applications on 1P6M ASIC compatible CMOS MEMS process",
abstract = "A novel design to combine RF transmitter as well as sensor monolithically has been proposed. A 2.4GHz RF transmitter is integrated with a single axis accelerometer. The two port spiral transformer of which the secondary inductor is designed to be suspended with MEMS structure. The mutual inductance of the transformer will be changed due to displacement of the proof mass. The magnetic flux variation can be sensed by demodulation signal and the measured sensitivity is 11.8 Hz/g.",
keywords = "Accelerometer, CMOS-MEMS, Impedance Matching, Inductive, Transformer couple, Transmitter",
author = "Chu, {Pao Min} and Kuei-Ann Wen",
year = "2018",
month = oct,
day = "3",
doi = "10.1109/SMELEC.2018.8481280",
language = "English",
series = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "33--36",
booktitle = "2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings",
address = "United States",
note = "13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 ; Conference date: 15-08-2018 Through 17-08-2018",
}