Integration design of wide-dynamic-range MEMS magnetometer and oscillator

Chao Hung Song, Kuei-Ann Wen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    3 Scopus citations

    Abstract

    This paper presents a Lorentz current-based MEMS magnetometer integrated with MEMS oscillator. The auto capacitance offset calibration magnetometer can achieve a tunable sensitivity from 12 to 2.94×106 T/V and eliminate the capacitance mismatch caused by process variation under 0.084fF by SAR calibrator. The natural frequency of proposed differential oscillator is around 18.8 kHz, Q-factor of 183 under the bias voltage 20 V and at 760Torr ambient pressure. The proposed biasing method of oscillator obtains a frequency tuning range of 58510 ppm, resulting in a wide-dynamic-range which is about 107.8dB. FOM of the oscillator design is 4.75×1020 Hz2Ω2. The integrated magnetometer and oscillator is implemented in 1P6M ASIC compatible CMOS MEMS process.

    Original languageEnglish
    Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages17-20
    Number of pages4
    ISBN (Electronic)9781538652831
    DOIs
    StatePublished - 3 Oct 2018
    Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
    Duration: 15 Aug 201817 Aug 2018

    Publication series

    NameIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
    Volume2018-August

    Conference

    Conference13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
    Country/TerritoryMalaysia
    CityKuala Lumpur
    Period15/08/1817/08/18

    Keywords

    • differential oscillator
    • magnetometer
    • MEMS
    • wide-dynamic-range

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