Integrated silicon-polymer laterally stacked bender for sensing microgrippers

T. Chu Duc; J. Wei; P. M. Sarro; Gih Keong Lau

doi:10.1109/ICSENS.2007.355555

Integrated silicon-polymer laterally stacked bender for sensing microgrippers

T. Chu Duc, J. Wei, P. M. Sarro, Gih Keong Lau

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 μm long, 65 μm wide and 50 μm high. The microgripper generates a large motion up to 52 μm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164°C at 2 V.

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	662-665
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355555
State	Published - 2006
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	22/10/06 → 25/10/06

Access to Document

10.1109/ICSENS.2007.355555

Cite this

@inproceedings{a1b12a5746344f49a8fb01c310729c4d,

title = "Integrated silicon-polymer laterally stacked bender for sensing microgrippers",

abstract = "This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 μm long, 65 μm wide and 50 μm high. The microgripper generates a large motion up to 52 μm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164°C at 2 V.",

author = "Duc, {T. Chu} and J. Wei and Sarro, {P. M.} and Lau, {Gih Keong}",

year = "2006",

doi = "10.1109/ICSENS.2007.355555",

language = "English",

isbn = "1424403766",

series = "Proceedings of IEEE Sensors",

pages = "662--665",

booktitle = "2006 5th IEEE Conference on Sensors",

note = "2006 5th IEEE Conference on Sensors ; Conference date: 22-10-2006 Through 25-10-2006",

}

TY - GEN

T1 - Integrated silicon-polymer laterally stacked bender for sensing microgrippers

AU - Duc, T. Chu

AU - Wei, J.

AU - Sarro, P. M.

AU - Lau, Gih Keong

PY - 2006

Y1 - 2006

N2 - This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 μm long, 65 μm wide and 50 μm high. The microgripper generates a large motion up to 52 μm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164°C at 2 V.

AB - This paper presents a novel electro-thermal microgripper based on integrated silicon-polymer laterally stacked microactuators. The device consists of a serpentine-shape deep silicon structure with a thin film aluminum heater on the top and filling polymer in the trenches among the vertical silicon parts. The fabrication is based on deep reactive ion etching of silicon, aluminum sputtering and SU8 filling. The actuator is 500 μm long, 65 μm wide and 50 μm high. The microgripper generates a large motion up to 52 μm at a driving voltage of only 2 V and with a power consumption of 50 mW. The maximum working temperature is 164°C at 2 V.

UR - http://www.scopus.com/inward/record.url?scp=50149121394&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.355555

DO - 10.1109/ICSENS.2007.355555

M3 - Conference contribution

AN - SCOPUS:50149121394

SN - 1424403766

SN - 9781424403769

T3 - Proceedings of IEEE Sensors

SP - 662

EP - 665

BT - 2006 5th IEEE Conference on Sensors

T2 - 2006 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -

Integrated silicon-polymer laterally stacked bender for sensing microgrippers

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this