Integrated metasurfaces on silicon photonics for emission shaping and holographic projection

Ping Yen Hsieh, Shun Lin Fang, Yu Siang Lin, Wen Hsien Huang, Jia Min Shieh, Peichen Yu, You Chia Chang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


The emerging applications of silicon photonics in free space, such as LiDARs, free-space optical communications, and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. In these applications, silicon photonic chips deliver free-space emission to detect or manipulate external objects. Light needs to emit from a silicon photonic chip to the free space with specific spatial modes, which produce focusing, collimation, orbital angular momentum, or even holographic projection. A platform that offers versatile shaping of free-space emission, while maintaining the CMOS compatibility and monolithic integration of silicon photonics is in pressing need. Here we demonstrate a platform that integrates metasurfaces monolithically on silicon photonic integrated circuits. The metasurfaces consist of amorphous silicon nanopillars evanescently coupled to silicon waveguides. We demonstrate experimentally diffraction-limited beam focusing with a Strehl ratio of 0.82. The focused spot can be switched between two positions by controlling the excitation direction. We also realize a meta-hologram experimentally that projects an image above the silicon photonic chip. This platform can add a highly versatile interface to the existing silicon photonic ecosystems for precise delivery of free-space emission.

Original languageEnglish
Pages (from-to)4687-4695
Number of pages9
Issue number21
StatePublished - 1 Dec 2022


  • holography
  • metasurfaces
  • silicon photonics


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