Inhibition of bird's beak in LOCOS by new buffer N2O oxide

Tien-Sheng Chao; J. Y. Cheng; T. F. Lei

doi:10.1049/el:19950208

Inhibition of bird's beak in LOCOS by new buffer N₂O oxide

Tien-Sheng Chao
, J. Y. Cheng
, T. F. Lei

Department of Electrophysics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

In the Letter new N₂O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

Original language	English
Pages (from-to)	323-324
Number of pages	2
Journal	Electronics Letters
Volume	31
Issue number	4
DOIs	https://doi.org/10.1049/el:19950208
State	Published - 16 Feb 1995

Keywords

Oxidation
Silicon

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10.1049/el:19950208

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title = "Inhibition of bird's beak in LOCOS by new buffer N2O oxide",

abstract = "In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.",

keywords = "Oxidation, Silicon",

author = "Tien-Sheng Chao and Cheng, \{J. Y.\} and Lei, \{T. F.\}",

year = "1995",

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journal = "Electronics Letters",

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AU - Chao, Tien-Sheng

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N2 - In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

AB - In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

KW - Oxidation

KW - Silicon

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U2 - 10.1049/el:19950208

DO - 10.1049/el:19950208

M3 - Article

AN - SCOPUS:0029251772

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EP - 324

JO - Electronics Letters

JF - Electronics Letters

IS - 4

ER -

Inhibition of bird's beak in LOCOS by new buffer N₂O oxide

Abstract

Keywords

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