Inhibition of bird's beak in LOCOS by new buffer N2O oxide

Tien-Sheng Chao, J. Y. Cheng, T. F. Lei

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOCOS isolation. This new structure can result in a shorter bird's, beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.

Original languageEnglish
Pages (from-to)323-324
Number of pages2
JournalElectronics Letters
Issue number4
StatePublished - 16 Feb 1995


  • Oxidation
  • Silicon


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