INFLUENCE OF SILICIDE FORMATION ON SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting^*, M. Wittmer, King-Ning Tu

^*Corresponding author for this work

International College of Semiconductor Technology

Research output: Contribution to conference › Paper › peer-review

Original language	English
Pages	242-249
Number of pages	8
State	Published - 1 Dec 1982

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