INFLUENCE OF SILICIDE FORMATION OF SHALLOW p-n JUNCTION CHARACTERISTICS.

C. Y. Ting*, M. Wittmer, King-Ning Tu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)257-258
Number of pages2
JournalElectrochemical Society Extended Abstracts
Volume82-2
StatePublished - 1 Dec 1982

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