@inbook{5069ba9c5d8348f6a81169fdfee33868,
title = "Industry 4.0 for Semiconductor Manufacturing",
abstract = "The fourth industrial revolution, or Industry 4.0, was introduced by the German government to build smart factories, which is viewed as the ultimate realization of smart manufacturing.",
author = "Chen, \{Tin Chih Toly\}",
note = "Publisher Copyright: {\textcopyright} 2023, The Author(s), under exclusive license to Springer Nature Switzerland AG.",
year = "2023",
doi = "10.1007/978-3-031-14065-5\_2",
language = "English",
series = "SpringerBriefs in Applied Sciences and Technology",
publisher = "Springer Science and Business Media Deutschland GmbH",
pages = "21--40",
booktitle = "SpringerBriefs in Applied Sciences and Technology",
address = "德國",
}