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Indium Zinc Oxide Nanosheet Transistor with 2 nm Channel Thickness for Monolithic Three-Dimensional Integrated Circuit

  • Zhen Hao Li
  • , Tsung Che Chiang
  • , Yu Chen Chen
  • , Hsin Hua Lee
  • , Yu Ting Tsai
  • , Po Tsun Liu*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

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