Indium Zinc Oxide Nanosheet Transistor with 2 nm Channel Thickness for Monolithic Three-Dimensional Integrated Circuit

Zhen Hao Li, Tsung Che Chiang, Yu Chen Chen, Hsin Hua Lee, Yu Ting Tsai, Po Tsun Liu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

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Material Science

Engineering

Chemical Engineering

Earth and Planetary Sciences