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Improving Performance and Breakdown Voltage in Normally-Off GaN Recessed Gate MIS-HEMTs Using Atomic Layer Etching and Gate Field Plate for High-Power Device Applications

  • An Chen Liu
  • , Po Tsung Tu
  • , Hsin Chu Chen*
  • , Yung Yu Lai
  • , Po Chun Yeh
  • , Hao Chung Kuo*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

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