Improving electrical performance of the scaled low-temperature poly-si thin film transistors using vacuum encapsulation technique

Wei Kai Lin*, Ta Chuan Liao, Chun Yu Wu, Shih Wei Tu, Yen Ting Liu, Jun Quan Lin, Huang-Chung Cheng, Feng Tso Chien, Wan Lu Chen, Chii Wen Chen, Ya-Hsiang Tai

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science