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Improvements of Fermi-level pinning and NBTI by fluorinated HfO 2-CMOS
Chao Sung Lai, Woei Cherng Wu, Huai Hsien Chiu, Jer Chyi Wang, Pai Chi Chou, Tien-Sheng Chao*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations