Improvement on performance and reliability of TaN/HfO2 LTPS-TFTs with fluorine implantation
- Ming Wen Ma
- , Chih Yang Chen
- , Chun Jung Su
- , Woei Cherng Wu
- , Tsung Yu Yang
- , Kuo Hsing Kao
- , Tien-Sheng Chao*
- , Tan Fu Lei
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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Scopus
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