Improvement on performance and reliability of TaN/HfO2 LTPS-TFTs with fluorine implantation

Ming Wen Ma, Chih Yang Chen, Chun Jung Su, Woei Cherng Wu, Tsung Yu Yang, Kuo Hsing Kao, Tien-Sheng Chao*, Tan Fu Lei

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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