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Improvement of thin oxides thermally grown on the reactive-ion-etched silicon substrates
Shih Yuan Ueng, Ping Wei Wang, Tzong Kuei Kang, Tien-Sheng Chao, Wen Ho Chen, Bao Tung Dai, Hung Chong Cheng
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations