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Improvement of reliability for polycrystalline thin-film transistors using self-aligned fluorinated silica glass spacers
Chun Hao Tu*, Ting Chang Chang, Po-Tsun Liu, Hsiao-Wen Zan, Ya-Hsiang Tai, Li Wei Feng, Yung Chun Wu, Chun Yen Chang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations