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Improvement in Integration Issues for Organic Low-k Hybrid-Organic-Siloxane-Polymer
Po-Tsun Liu*, Ting Chang Chang, Hsing Su, Yi Shian Mor, Ya Liang Yang, Henry Chung, Jan Hou, Simon M. Sze
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
40
Scopus
citations