Improved retention characteristic in polycrystalline silicon-oxide-hafnium oxide-oxide-silicon-type nonvolatile memory with robust tunnel oxynitride

  • Chih Ren Hsieh
  • , Chiung Hui Lai
  • , Bo Chun Lin
  • , Yuan Kai Zheng
  • , Jen Chung Lou
  • , Kuo-Jui Lin

    Research output: Contribution to journal › Article › peer-review

    2 Scopus citations

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    Material Science