Improved performance of F-ions-implanted poly-Si thin-film transistors using solid phase crystallization and excimer laser crystallization

Chun Hao Tu*, Ting Chang Chang, Po-Tsun Liu, Che Yu Yang, Li Wei Feng, Chia Chou Tsai, Li Ting Chang, Yung Chun Wu, Simon M. Sze, Chun-Yen Chang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Material Science

Engineering