Improved near-infrared luminescence of Si-rich SiO2 with buried Si nanocrystals grown by PECVD at optimized N2O fluence

Chia Yang Chen*, Chun Jung Lin, Hao-Chung Kuo, Gong Ru Lin, Yu Lun Chueh, Li Jen Chou, Chih Wei Chang, Wei-Guang Diau

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

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Physics

Engineering

Material Science

Chemistry