Improved Modulation Bandwidth of Blue Mini-LEDs by Atomic-Layer Deposition Sidewall Passivation

Shou Qiang Lai, Ting Wei Lu, Su Hui Lin, Yi Lin, Guo Chun Lin, Jian Hua Pan, Yue Long Zhuang, Yi Jun Lu, Yue Lin, Hao Chung Kuo*, Zhong Chen, Ting Zhu Wu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


By adopting atomic layer deposition (ALD) sidewall passivation, the electroluminescence (EL) and communication performances of mini-light emitting diodes (mini-LEDs) of different sizes were improved. In particular, the most significant improvement in the electroluminescence properties of the external quantum efficiency (EQE) (a 7.2% increase), leakage current, and the communication properties of the modulation bandwidth (a 20% increase) transmission rate and bit error rate (BER) was found in the smallest mini-LEDs (80 μm × 120 μ m). According to the results of time-resolved photoluminescence (TRPL) measurements, the carrier lifetime of the samples can be affected by both the size and ALD sidewall passivation. In addition, the effects of ALD sidewall passivation for visible-light communication (VLC) were demonstrated.

Original languageEnglish
Pages (from-to)4936-4943
Number of pages8
JournalIEEE Transactions on Electron Devices
Issue number9
StatePublished - 1 Sep 2022


  • Electroluminescent devices
  • light emitting diodes (LEDs)
  • optoelectronic devices
  • semiconductor diodes
  • visible-light communication (VLC)


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