Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures

Yi Fan Huang*, Surojit Chattopadhyay, Yi Jun Jen, Cheng Yu Peng, Tze An Liu, Yu Kuei Hsu, Ci Ling Pan, Hung Chun Lo, Chih Hsun Hsu, Yuan Huei Chang, Chih Shan Lee, Kuei Hsien Chen, Li Chyong Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1009 Scopus citations


Nature routinely produces nanostructured surfaces with useful properties, such as the self-cleaning lotus leaf, the colour of the butterfly wing, the photoreceptor in brittlestar and the anti-reflection observed in the moth eye. Scientists and engineers have been able to mimic some of these natural structures in the laboratory and in real-world applications. Here, we report a simple aperiodic array of silicon nanotips on a 6-inch wafer with a sub-wavelength structure that can suppress the reflection of light at a range of wavelengths from the ultraviolet, through the visible part of the spectrum, to the terahertz region. Reflection is suppressed for a wide range of angles of incidence and for both s- and p-polarized light. The antireflection properties of the silicon result from changes in the refractive index caused by variations in the height of the silicon nanotips, and can be simulated with models that have been used to explain the low reflection from moth eyes. The improved anti-reflection properties of the surfaces could have applications in renewable energy and electro-optical devices for the military.

Original languageEnglish
Pages (from-to)770-774
Number of pages5
JournalNature nanotechnology
Issue number12
StatePublished - Dec 2007


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