Impacts of HF etching on ultra-thin core gate oxide integrity in dual gate oxide CMOS technology

Da Yuan Lee, Horng-Chih Lin, Chia Lin Chen, Tiao Yuan Huang, Ta-Hui Wang, Tze Liang Lee, Shih Chang Chen, Mong Song Liang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

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Physics & Astronomy

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Chemical Compounds