Impacts of fluorine ion implantation with low-temperature solid-phase crystallized activation on high-κ LTPS-TFT

Ming Wang Ma*, Chih Yang Chen, Chun Jung Su, Woei Cherngm Wu, Yi Hong Wu, Tsung Yu Yang, kuo Hsing Kao, Tien-Sheng Chao, Tan Fu Lei

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

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Keyphrases

Chemistry

Material Science