Impacts of Asymmetry Double Gate Structure on Reliability Degradation of Thin-Film Transistor with Nanosheet Channel

William Cheng Yu Ma*, Chun Jung Su, Kuo Hsing Kao, Ta Chun Cho, Jing Qiang Guo, Cheng Jun Wu, Po Ying Wu, Jia Yuan Hung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This work investigates the characteristics and reliability of double-gate (DG) and single-gate (SG) mode operations in polycrystalline-silicon nanosheet transistors (TFTs). It is observed that the threshold voltage and subthreshold swing in the DG mode are lower than those in the SG mode, while the on-state current is much higher. The DG mode provides better control over the channel potential, resulting in higher electron density and field-effect mobility. Moreover, the back-gate voltage can be used to adjust the threshold voltage of the TFT in SG mode. The impact of the back-gate voltage on the reliability of the device is also studied. The results indicate that the DG mode is more reliable than the SG mode under positive gate bias stress, as the DG mode has a stronger channel potential control ability. In contrast, the back-gate voltage has little effect on the reliability of the TFT in SG mode.

Original languageEnglish
Title of host publication30th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials, AM-FPD 2023 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages129-131
Number of pages3
ISBN (Electronic)9784991216947
StatePublished - 2023
Event30th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2023 - Hybrid, Kyoto, Japan
Duration: 4 Jul 20237 Jul 2023

Publication series

Name30th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2023 - Proceedings

Conference

Conference30th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2023
Country/TerritoryJapan
CityHybrid, Kyoto
Period4/07/237/07/23

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