Impact of uniaxial strain on channel backscattering characteristics and drain current variation for nanoscale PMOSFETs

Wei Lee*, Jack J Y Kuo, Willian P N Chen, Pin Su, Min Chie Jeng

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    15 Scopus citations

    Abstract

    Using an improved temperature-dependent method, this paper clarifies that channel backscattering of nanoscale PMOSFETs can be reduced by the uniaxially compressive strain. For the first time, the electrostatic potential of the source-channel junction barrier has been experimentally characterized with strain and gate voltage dependence. We further demonstrate that the strain technology can improve the drain current variation as well as the mismatching properties through the enhanced ballistic efficiency. Moreover, the improvement shows gate length and drain voltage dependence.

    Original languageEnglish
    Title of host publication2009 Symposium on VLSI Technology, VLSIT 2009
    Pages112-113
    Number of pages2
    StatePublished - 15 Jun 2009
    Event2009 Symposium on VLSI Technology, VLSIT 2009 - Kyoto, Japan
    Duration: 16 Jun 200918 Jun 2009

    Publication series

    NameDigest of Technical Papers - Symposium on VLSI Technology
    ISSN (Print)0743-1562

    Conference

    Conference2009 Symposium on VLSI Technology, VLSIT 2009
    Country/TerritoryJapan
    CityKyoto
    Period16/06/0918/06/09

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