TY - GEN
T1 - Impact of micro-/nano-electronics, miniaturization limit, and technology development for the next 10 years and after
AU - Iwai, H.
N1 - Publisher Copyright:
© The Electrochemical Society
PY - 2021
Y1 - 2021
N2 - Electronics was the most important technological revolution in the 20th century. Then, micro-/nano-electronics is the 2nd revolution. Without the micro-/nano-electronics, today's smart society with internet and artificial intelligence would not exist. For the further progress of the modern smart society, the continuation of the MOSFET downsizing is important. The downsizing is expected to reach its limit very soon when the gate length of MOSFETs reaches around 10 nm. However, until reaching the limit, there are so many things to develop in order to keep the Moore's law as long as the merit is still huge. They are 3D integration, introduction of new materials into interconnects, and resolution improvement of EUV lithography. Finally, Moore's law is expected to stop in 10 years or so, but the market demands for the CMOS LSIs as well as other semiconductor devices will keep increasing in the future smart society.
AB - Electronics was the most important technological revolution in the 20th century. Then, micro-/nano-electronics is the 2nd revolution. Without the micro-/nano-electronics, today's smart society with internet and artificial intelligence would not exist. For the further progress of the modern smart society, the continuation of the MOSFET downsizing is important. The downsizing is expected to reach its limit very soon when the gate length of MOSFETs reaches around 10 nm. However, until reaching the limit, there are so many things to develop in order to keep the Moore's law as long as the merit is still huge. They are 3D integration, introduction of new materials into interconnects, and resolution improvement of EUV lithography. Finally, Moore's law is expected to stop in 10 years or so, but the market demands for the CMOS LSIs as well as other semiconductor devices will keep increasing in the future smart society.
UR - http://www.scopus.com/inward/record.url?scp=85107199647&partnerID=8YFLogxK
U2 - 10.1149/10204.0081ecst
DO - 10.1149/10204.0081ecst
M3 - Conference contribution
AN - SCOPUS:85107199647
T3 - ECS Transactions
SP - 81
EP - 95
BT - 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021 - High Purity and High Mobility Semiconductors 16
A2 - Simoen, E.
A2 - Kononchuk, O.
A2 - Nakatsuka, O.
A2 - Claeys, C.
PB - IOP Publishing Ltd.
T2 - 239th ECS Meeting with the 18th International Meeting on Chemical Sensors, IMCS 2021
Y2 - 30 May 2021 through 3 June 2021
ER -