Impact of layout pickups to ESD robustness of MOS transistors in sub 100-nm CMOS process

Ming-Dou Ker*, Yong Ru Wen, Wen Yi Chen, Chun Yu Lin

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    11 Scopus citations

    Abstract

    Electrostatic discharge (ESD) is an inevitable event in CMOS integrated circuits. Layout structure is one of the im portant factors that affect ESD robustness of MOS transistors. In this work, the impact of inserting additional layout pickups to ESD robustness of both multi-finger NMOS and PMOS transistors has been studied in a 90-nm CMOS process. Measurement results have shown that multi-finger MOS transistors without additional pickup inserted into their source regions can sustain a higher ESD protection level at the same effective device dimension.

    Original languageEnglish
    Title of host publication2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program
    Pages100-103
    Number of pages4
    DOIs
    StatePublished - 1 Dec 2010
    Event2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Kaohsiung, Taiwan
    Duration: 18 Nov 201019 Nov 2010

    Publication series

    Name2010 International Symposium on Next-Generation Electronics, ISNE 2010 - Conference Program

    Conference

    Conference2010 International Symposium on Next-Generation Electronics, ISNE 2010
    Country/TerritoryTaiwan
    CityKaohsiung
    Period18/11/1019/11/10

    Keywords

    • Electrostatic discharge (ESD)
    • Pickup

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