I-2 Shallow Silicide Contact for Shallow Junction Devices

King-Ning Tu^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Original language	English
Number of pages	1
Journal	IEEE Transactions on Electron Devices
Volume	28
Issue number	10
DOIs	https://doi.org/10.1109/T-ED.1981.20516
State	Published - 1 Jan 1981

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