Hysteresis improvements by introducing a double-active-layered structure in a-InGaZnO TFTs

Yun Chu Tsai, Feng Jui Chan, Po-Tsun Liu, Han Ping D. Shieh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A-IGO/a-IGZO TFTs exhibited S.S of 0.4 V/decade and hysteresis of 0.40V, whereas a-IGZO TFTs showed S.S of 0.93 V/decade and hysteresis of 1.35V. A smoother surface roughness of 0.25nm in a-IGZO film was obtained by a double-active-layered structure with a-IGO/a-IGZO. A-IGO/a-IGZO TFTs also presented less charge trapping under NBIS stressing.

Original languageEnglish
Title of host publication21st International Display Workshops 2014, IDW 2014
PublisherSociety for Information Display
Pages286-289
Number of pages4
ISBN (Electronic)9781510827790
StatePublished - 1 Jan 2014
Event21st International Display Workshops 2014, IDW 2014 - Niigata, Japan
Duration: 3 Dec 20145 Dec 2014

Publication series

Name21st International Display Workshops 2014, IDW 2014
Volume1

Conference

Conference21st International Display Workshops 2014, IDW 2014
Country/TerritoryJapan
CityNiigata
Period3/12/145/12/14

Keywords

  • A-IGO
  • A-IGZO
  • Hysteresis
  • Thin Film Transistors

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