Hydrogen Iodide (HI) Neutral Beam Etching for InGaN/GaN Micro-LED

Takahiro Ishihara, Daisuke Ohori, Xuelun Wang, Kazuhiko Endo, Nobuhiro Natori, Daisuke Sato, Yi-Ming Li, Seiji Samukawa*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Keyphrases

Engineering

Material Science