HiPIMS-grown AlN buffer for threading dislocation reduction in DC-magnetron sputtered GaN epifilm on sapphire substrate

Jui Che Chang, Eric Nestor Tseng, Yi Ling Lo, Sanjay Nayak, Daniel Lundin, Per O.Å. Persson, Ray Hua Horng, Lars Hultman, Jens Birch, Ching Lien Hsiao*

*Corresponding author for this work

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