Highly Stable Short Channel Ultrathin Atomic Layer Deposited Indium Zinc Oxide Thin Film Transistors with Excellent Electrical Characteristics

Yan Kui Liang, Wei Li Li, Jun Yang Zheng, Yu Lon Lin, Yu Cheng Lu, Ching Hua Chiu, Dong Ru Hsieh, Tsung Te Chou, Chi Chung Kei, Huai Ying Huang, Yu Ming Lin, Yuan-Chieh Tseng, Tien-Sheng Chao, Edward Yi Chang, Chun Hsiung Lin

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Engineering & Materials Science

Chemical Compounds