Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature

Pragya Singh, Li Lun Hu, Hsiao-Wen Zan*, Tseung-Yuen Tseng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.

Original languageEnglish
Article number095501
Pages (from-to)1-7
Number of pages7
JournalNanotechnology
Volume30
Issue number9
DOIs
StatePublished - Jan 2019

Keywords

  • ZnO
  • gas sensor
  • metal oxide semiconductor
  • nanorods thin film
  • nitric oxide
  • vertical channel

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