Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring

Manu Garg, Dhairya S. Arya, Sumit Sharma, Sushil Kumar, Wasi Uddin, Samaresh Das, Yi Chiu, Pushpapraj Singh*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The letter reports highly sensitive metal oxide (V2O5) based NanoElectromechanical Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence of additional supplementary material in the sensing element increases the sensing area and enables the in-situ monitoring capability. Considering the feasibility of the idea, the design is simulated and verified with the experimental results of the fabricated device. The device shows a sensitivity of 5.76 % per decade-Pa in the working range from 4 Pa to 2.7× 103 Pa. The maximum average temperature of the sensing element is 48 °C at 4 Pa. It ensures corrosion-free operation and increases the lifetime of the device. The computed thermal response time of the device is 500 ms at a power consumption of 285μ W. [2020-0335].

Original languageEnglish
Article number9411512
Pages (from-to)340-342
Number of pages3
JournalJournal of Microelectromechanical Systems
Volume30
Issue number3
DOIs
StatePublished - Jun 2021

Keywords

  • Hermeticity
  • NanoElectromechanical Systems (NEMS)
  • Pirani gauge
  • Vacuum packaging
  • Vanadium Pentoxide (V O)

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