Abstract
The letter reports highly sensitive metal oxide (V2O5) based NanoElectromechanical Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence of additional supplementary material in the sensing element increases the sensing area and enables the in-situ monitoring capability. Considering the feasibility of the idea, the design is simulated and verified with the experimental results of the fabricated device. The device shows a sensitivity of 5.76 % per decade-Pa in the working range from 4 Pa to 2.7× 103 Pa. The maximum average temperature of the sensing element is 48 °C at 4 Pa. It ensures corrosion-free operation and increases the lifetime of the device. The computed thermal response time of the device is 500 ms at a power consumption of 285μ W. [2020-0335].
Original language | English |
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Article number | 9411512 |
Pages (from-to) | 340-342 |
Number of pages | 3 |
Journal | Journal of Microelectromechanical Systems |
Volume | 30 |
Issue number | 3 |
DOIs | |
State | Published - Jun 2021 |
Keywords
- Hermeticity
- NanoElectromechanical Systems (NEMS)
- Pirani gauge
- Vacuum packaging
- Vanadium Pentoxide (V O)